A method of generating pulsed coherent radiation, comprises the step of
generating high harmonic pulses by an interaction of laser light pulses
with a non-linear medium contained in a resonant cavity, wherein the
non-linear medium is arranged in an environment of reduced pressure.
Furthermore, a radiation source of generating pulsed coherent radiation
is described, comprising a laser pulse source for generating laser light
pulses, a resonant cavity including a non-linear medium for generating
high harmonic pulses by an interaction of the laser light pulses with the
non-linear medium, wherein the non-linear medium is arranged in an
environment of reduced pressure.