A photogrammetric system uses an array of spaced-apart targets coupled to a structure. Each target exhibits fluorescence when exposed to a broad beam of illumination. A photogrammetric imaging system located remotely with respect to the structure detects and processes the fluorescence (but not the illumination wavelength) to measure the shape of a structure.

 
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< Detector configurations for optical metrology

> Automated process control using optical metrology and a correlation between profile models and key profile shape variables

> Optical analysis system using multivariate optical elements

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