An exposure apparatus for exposing a substrate to light via a reticle. A cooling device cools first water supplied from a facility by use of second water supplied for the facility, in which a temperature of the second water to be supplied from the facility is lower than a temperature of the first water to be supplied from the facility, a first supply path supplies the first water from the facility to the cooling device, a second supply path supplies the second water from the facility to the cooling device, and a third supply path supplies the first water cooled by the cooling device from the cooling device to a heat source inside the exposure apparatus.