A developing apparatus includes, to process substrates each coated with a
resist and processed by an exposure process by a developing process,
includes: plural developing units each provided with a substrate holding
device for stably pouring a developer onto the substrate, a first
developer nozzle to be used in common by the plural developing units to
pour the developer in a band-shaped flow onto the substrates held by each
of the substrate holding devices, a nozzle driving mechanism for carrying
the first developer nozzle from one to another of the developing units,
and moving the first developer nozzle with one end of a band-shaped area
into which the developer is to be poured through the first developer
nozzle directed toward the center of the substrate in each of the
developing units such that a part in a surface of the substrate onto
which the developer is poured moves from a central part toward a
peripheral part or from a peripheral part toward a central part in the
surface of the substrate to coat the surface of the substrate entirely
with a developer film, and second developer nozzles for pouring the
developer into a circular area or a band-shaped area of a short length
shorter than that of the band-shaped area into which the first developer
nozzle pours the developer in a central part of the substrate on which
the developer film has been formed by the first developer nozzle. The
nozzles are used selectively for developing steps.