Disclosed is a substrate damage detection mechanism using Radio Frequency Identification (RFID) tag including a substrate, at least one RFID tag with a RFID chip, a RFID transmitter and at least one data input/output port and at least one conducting circuit loop arranged to cover the substrate and provided with a first end that is electrically connected to a reference voltage and a second end that is electrically connected to the data input/output port of the RFID tag. The RFID chip generates a conductive code when the conducting circuit loop is originally conducting and generates a open-circuit code when the conducting circuit loop becomes open circuit resulting from the damage of the substrate in which both the conductive code and the open-circuit code are transmitted by the RFID transmitter and received by a RFID reader to determine the damage of the substrate.