Disclosed are a method for manufacturing of a master for manufacturing of optical elements having optically effective structures by molding structures, which are formed on the master, onto a surface of an optical substrate, by providing a substrate; coating a surface of said substrate for forming a coating on said substrate; and patterning said coating for forming structures in said coating; a master for manufacturing of optical elements; and a method for manufacturing of optical elements as well as to an optical element having at least one surface, wherein at least in portions of said surface optically effective structures are formed.