A table drive system comprising a first drive assembly configured for moving a support table in a first direction, a second drive assembly configured for moving the support table in a second direction and a drive motor coupled to the first drive assembly and the second drive assembly is provided. The drive motor is configured to drive the first drive assembly and the second drive assembly.

 
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< Sliding element

> Non-contacting face seals and thrust bearings

> Rotatable supporting module and gantry apparatus having same

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