A system transports a device into a piece of industrial equipment for the purpose of collecting data inside of the industrial equipment. In an embodiment, the industrial equipment is a furnace and the device is an IR camera. The system opens a door covering an opening on the furnace, moves the IR camera inside of the furnace for a short time, the IR camera captures images, and the system removes the camera from the furnace and closes the door.

 
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< Photographing apparatus and method for taking a picture

> Camera module

> Substrate processing apparatus

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