A micro magnetic device having a body defining at least part of an enclosed chamber, a pole comprising a soft magnetic material within the chamber, and an electrically conductive coil positioned around the pole. A diaphragm integral with the body defines a top of the chamber opposite the pole. The diaphragm supports a permanent magnetic film. Multiple micro magnetic devices can be combined to form an array. The micro magnetic device may be, for example, a speaker or a sensor. The micro magnetic device may be made by MEMS or thin film techniques.