Probe structures that utilize a folded beam structure to support the probe tip. The folded beam or supported-beam structure provides a linear spring force over a large displacement range while resisting probe tip tilting and lateral motion of the probe tip. In one embodiment, the probe structure has a supported-beam structure comprising an inner beam structure surrounded by an outer support, the inner beam structure pivotally connected to the outer support. The inner beam structure has a central region and the outer support having outer corner regions. The outer corner regions provide an attachment region to a supporting mechanism for the probe structure. A probe tip is located at the central region of the inner beam structure. The probe structure may have at least three arms, for example, four arms.