An electrostatic micro relay, in which the contact gap between moving and fixed contacts may be increased and the reliability and high-performance regarding contacting and separating the moving contact with and from the fixed contact may be improved. In the micro relay according to the invention, as a comb-shaped moving electrode is supported at an obliquely upper position relative to a fixed comb-shaped electrode, the contact gap may be lengthened. When a predetermined voltage is applied between the contacts, the moving electrode is moved obliquely downward toward the fixed electrode such that the contact surface of the moving electrode slidably contacts the contact surface of the fixed electrode. This slidably contact may cause a wiping effect, whereby each contact surface may be kept clean.

 
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