In the present invention, when trouble occurs and the operation of a
substrate processing apparatus is stopped, substrate information
containing positions and processing states of the substrates located in
the apparatus at that time is stored, and the power supply of the
apparatus is then turned off. When the apparatus is restarted, the
substrates located in the apparatus are collected into a substrate
housing unit, and each of the substrates in the substrate housing unit is
then sequentially transferred to a plurality of processing units
following the same transfer recipe as that before occurrence of trouble,
and substrate processing is not performed in a processing unit in which
processing has already been completed, whereas substrate processing is
performed in a processing unit in which processing has not been performed
yet, based on the substrate information.