A finger biometric sensor may include a thin film substrate, a thin film transistor (TFT) layer on the thin film substrate, and an array of electric field sensing electrodes adjacent the TFT layer for receiving a finger adjacent thereto. The TFT layer may include a plurality of TFTs defining a respective TFT amplifier stage for each electric field sensing electrode. The sensor may further include a finger excitation electrode adjacent the array of electric field sensing electrodes, and at least one integrated circuit adjacent the thin film substrate. The integrated circuit may include a monocrystalline substrate and processing circuitry adjacent the monocrystalline substrate and connected to the TFT amplifier stages.