The invention is directed to a precision release aerosol dispenser for dispensing material from a pressurized source of material. The precision release aerosol dispenser comprises dispensing means for dispensing into the environment the material from the source of material, a microchip coupled to the dispensing means for controlling the release rate of the material to be dispensed, and means for initiating the dispensing means. The microchip usable in the precision aerosol dispenser of the invention is a multilayer device fabricated using MEMS fabrication techniques.