The invention provides a method that includes the stages of: (i) receiving
design information representative of a portion of an object that includes
sub micron measurement targets, (ii) processing the received design
information to provide a large number of measurement targets; and (iii)
associating target measurement parameters to each of large number of
measurement targets.The invention provides a system that includes: (i) an
interface for receiving design information representative of a portion of
a layer of an object that includes sub micron measurement targets; and
(ii) a processor, coupled to the interface, for processing the received
design information to provide a large number of measurement targets; and
for associating target measurement parameters to each of large number of
measurement targets.
