A transparent oxide electrode film is provided to have crystalline indium oxide as its main component in which the indium in the indium oxide is substituted with titanium at a titanium/indium atomic ratio between 0.003 and 0.120, and the resistivity of the transparent oxide electrode film is 5.7.times.10.sup.-4 .OMEGA.cm or less, so as to provide excellent transmittance for both the visible light region and the infrared light region, and low resistivity.

 
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