A chromosome using each of a plurality of parameters of a physical model
of a semiconductor element as a gene is defined and the parameters are
optimized using a genetic algorithm based on the characteristics
measurement data of the semiconductor element fabricated by way of trial.
In the selection processing of the genetic algorithm, a sum of a first
evaluation value based on linear scale data and a second evaluation value
based on logarithmic scale data is employed as the evaluation value of
the chromosome.