A microfluidic device a micromachined freestanding member adapted to sense
one or more properties of a fluid flowing through the freestanding
member. The freestanding member is supported by a substrate and spaced
apart and separated from the substrate to enable the freestanding member
to move relative to the substrate under the influence of a
vibration-inducing element. Movement of the freestanding member relative
to the substrate is then sensed by a sensing element. The freestanding
member has an inlet, an outlet, an internal passage that fluidically
couples the inlet and outlet, and a wall that defines and separates first
and second passage portions of the internal passage that are arranged in
fluidic series so that a fluid flowing through the internal passage flows
through the first and second passage portions in opposite directions.