The present disclosure relates to high purity apparati, e.g., magnetic hard disk drives, and more specifically, to coatings for particle reduction of surfaces of such apparati. The provided coatings include thin polymer coatings with reactive pendant groups having crosslinking functionality and ability to anchor to substrate surfaces to suppress particle shedding from substrate surfaces. Provided is a substrate that includes a coating on at least a portion of the substrate that comprises a fluorinated acrylate random copolymer. Methods of reducing particulate contamination are also provided.

 
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< METAL OXIDE-CONTAINING FILM-FORMING COMPOSITION, METAL OXIDE-CONTAINING FILM, METAL OXIDE-CONTAINING FILM-BEARING SUBSTRATE, AND PATTERNING METHOD

> POSITIVE RESIST COMPOSITION AND PATTERN MAKING METHOD USING THE SAME

> Fermentative production of fine chemicals

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