A spatial light modulator supported on a device substrate includes a
plurality of light modulation elements to modulate a light emitted from a
light source. The spatial light modulator and the device substrate
further comprises a cyclic structure on a surface of the spatial light
modulator and/or the device substrate for preventing a reflection of the
incident light from the cyclic structure. In an exemplary embodiment the
cyclic structure includes cyclic structural elements having a distance
between two cyclic elements shorter than the wavelength of an incident
light for preventing a reflection of the incident light from the cyclic
structure.