A dry etching method is provided, in which dry etching is performed in such a manner that a conductor to which an insulative substrate is attached is brought in electric, intimate contact with an electrode. In the dry etching method, the insulative substrate is attached to the conductor by means of a conductive grease. A diffractive optical element manufactured with the dry etching method is also provided.

 
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< Luminescence device and display apparatus

> Assembly of a semiconductor die attached to substrate with oxazoline derivative bearing an electron donor or acceptor functionality

> Copper gate electrode of liquid crystal display device and method of fabricating the same

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