A micro electrical mechanical system (MEMS) pressure sensor includes a base structure defining an opening, a plurality of support members coupled to the base structure, a thin-film diaphragm supported by the support members, and at least one strain-sensitive member associated with the at least one support member.

 
Web www.patentalert.com

< Network sensor system and protocol

> Multiple sensor processing

> Measuring apparatus and measuring method

~ 00507