There is provided a low-cost liquid supply apparatus using a system in which a liquid nozzle is moved, the apparatus being configured so that the installation area of the apparatus is small, a liquid vessel can be installed or removed easily without being hindered by equipment for moving the liquid nozzle, and further the number of parts is small. The liquid nozzle is attached to an arm capable of being turned reversibly around a turning shaft, and the movement of the liquid nozzle is controlled by the turning angle of the arm for either one axis of the X-axis and the Y-axis and is controlled by changing the length of the arm from the turning shaft for the other axis.

 
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> Method and apparatus for determining a substrate exchange position in a processing system

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