A reduced-pressure drying apparatus for drying a solvent in a liquid under a reduced pressure by evaporation of the solvent, includes a chamber including a first chamber and a second chamber, the first chamber accommodating work to which a liquid containing a film forming material is applied, the second chamber being coupled to the first chamber through a communicating part; a depressurizing unit depressurizing at least the second chamber; a communicating valve opening and closing the communicating part; and a control unit controlling a reduced pressure state at least of the second chamber by driving the depressurizing unit, the control unit also controlling an opening and closing state of the communicating part by driving the communicating valve.