To provide a film forming apparatus in which an impurity contained in an
organic compound is separated to be removed and a film is formed without
decreasing the purity of the purified organic compound, whereby a
high-purity organic compound is formed. A film forming apparatus of the
present invention includes a purifying chamber for purifying an organic
compound and a film forming chamber for vapor-depositing the purified
organic compound onto a substrate. The organic compound purified by a
zone melting method in the purifying chamber can be vapor-deposited onto
the substrate provided in the film forming chamber without decreasing the
purity thereof, so that a high-purity organic compound layer can be
formed.