The present invention relates to a method of determining physical properties of an optical layer or layer system by means of spectral transmission and/or reflection measurements, whereby in accordance with the spectrum of the transmission and/or reflection measurement, reference values for the wavelength-dependent refractive indices n.sub.0 and/or extinction coefficients k.sub.0 are chosen from known values or are determined experimentally and the variation that characterizes the layer is described by wavelength-independent variation constants K.sub.n and K.sub.k for the refractive indices and extinction coefficients.

 
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