A light-to-frequency converter includes a switch (130) connected in series with a reverse-biased photodiode (120). A node (150) in the current path through the switch and the photodiode is connected to the input of a Schmidt trigger (160), whose output controls the switch. New techniques are provided for motion compensation, partial readouts, dark current elimination, non-destructive testing, and sensing the state of a memory cell.

 
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> Sample dimension-measuring method and charged particle beam apparatus

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