The Miniature Fourier Transform Spectrophotometer provides the capability,
in a miniaturized device, of determining the light
absorption/transmission spectra of a collected sample of gas or liquid
though Fourier Transform spectroscopy techniques. The device takes an
optical input from an optical fiber, manipulates that light through
miniature optical components, and launches it into a miniaturized
Michelson interferometer with a scanning mirror that acquires the
interferogram of the optical input. The interferogram can be processed to
retrieve the spectrum of the input light. A novel multi-stepped
micro-mirror operates as the optical path length modulator in the
miniaturized interferometer. A unique monolithic beamsplitter/mirror
combination provides for accurate alignment of the components and greatly
simplifies product integration. The device is designed to cover various
optical spectra of interest. During operation, the precision and accuracy
of the microfabricated components in the device allow operation and
resolution even at extremely low wavelengths. In addition, the
miniaturized nature of the device allows it to be used in new and
extremely space-constrained applications.