A method for fabricating a thin film component according to one embodiment
comprises forming a wafer having a thin film layer, a release layer, and
a patterned layer of photoresist; transferring the pattern of the layer
of photoresist to the release layer and the thin film layer; adding a
layer of metal to the wafer; heating the wafer to a predetermined
temperature for a period of time sufficient to cause deformation of the
photoresist to an extent that the photoresist creates cracks in the metal
layer; applying a solvent to dissolve at least a portion of the release
layer, the solvent penetrating the cracks in the metal layer to reach the
release layer; and removing the release layer and any portions of the
layers above the release layer.