Plasmon energy is produced by exciting a plasmon resonance at least one
excitation position on a first surface of a first material, and the
plasmon energy is detected at at least one measurement position on the
first surface after the plasmon energy has propagated from the at least
one excitation position to the at least one measurement position. An
attenuation of plasmon energy is determined along a plurality of paths
between the at least one excitation position and the at least one
measurement position, and relative distances between the first surface
and a second surface of a second material are determined at a plurality
of points on at least one of the surfaces based on the determined
attenuation of plasmon energy along the plurality of paths.