The devices, systems and methods may continuously detect surface characteristics of a sample surface at a tilt. The exemplary system may have a conveying device for moving a sample surface, a light source for reflecting a beam of light off the sample surface, and a light detector with a light detection surface for continuous light detection. A lens may be used to reflect the beam of light from the sample surface and focus the beam of light on the light detection surface of the light detector. The area of the beam of light at the point of focus on the light detection surface may be unequal to the light detection surface. A reference analyzer may be used to determine the optical surface based on a comparison of the reflected light received with known reflected light values for known sample surfaces.

 
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> Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

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