Methods and apparatus for controlling and delivering a vaporous element or
compound, for example, selenium or sulfur, from a solid source to a work
piece are provided. The methods and apparatus may be used in photovoltaic
cell manufacturing. The apparatus may comprise a treatment chamber, for
example, a box furnace or a tube furnace. The chamber may include an
inner enclosure, an outer enclosure, and heating sources capable of
independent thermal control, for example, in compliance with a
predetermined heating schedule. The apparatus include devices and
mechanisms for isolating the treatment chambers from the ambient
environment. The methods and apparatus may be adapted to control
metalloid vapor delivery in photovoltaic cell processing, for example,
the processing of CIGS and CIGSS photovoltaic cells.