A microcontact printing method using an imprinted nanostructure is
provided, wherein the microcontact printing is introduced to a
nanoimprint lithography process to pattern a self-assembled monolayer
(SAM). The method includes forming a nanostructure on a substrate by
using the nanoimprint lithography process; and patterning the
nanostructure with the microcontact printing method. The operation of
patterning includes: depositing a metal thin film on the nanostructure;
contacting a plate with the nanostructure to selectively print the SAM on
the nanostructure, wherein the SAM is inked on the plate and the metal
thin film is deposited on the nanostructure; selectively removing the
metal thin film by using the SAM as a mask; removing the SAM from the
nanostructure; and patterning the substrate by using the remaining metal
thin film on the nanostructure as a mask.