An arrangement and a method are provided for non-destructively analyzing the composition of a delicate sample. The value of the sample depends at least partly on absence of visual defects. A laser source (301) produces a pulsed laser beam, and focusing optics (302) focus said pulsed laser beam into a focal spot on the sample. A sensor (312) receives and detects optical emissions from particles of the sample excited by said pulsed laser beam. A processing subsystem (111) produces information of the composition of the sample based on the optical emissions detected by said sensor (312).

 
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> Method and apparatus for detecting defects

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