A DAC circuit is provided which implements a buffered DAC input where the buffer is provided by a differential amplifier whose supply rail is correlated with the input to the DAC. In this way it is possible to buffer the circuitry using amplifiers whose open loop gain specifications may be relaxed without affecting the linearity performance of the DAC.

 
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> Reduced gas flow purging system in reflectometer, ellipsometer, polarimeter and the like systems

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