The present invention provides a method for manufacturing an interconnect
and a method for manufacturing an integrated circuit including the
interconnect. The method of manufacturing an interconnect, among other
steps, includes forming a via (160) in a substrate (130) and then forming
a base getter material (210) in the via (160). The method further
includes forming a photoresist layer (410) over the base getter material
(210), the photoresist layer (410) having an opening (420) therein
positioned over the via (160), and etching a trench (510) into the
substrate (130) using the opening (420) in the photoresist layer (410).