An image defect inspection apparatus which performs a defect detection for detecting a defect on a surface of a sample by comparing corresponding portions in a captured image of the surface of the sample. The apparatus includes a plurality of processor elements which perform the defect detection in parallel on regions created by dividing the captured image; and a processor unit, which receives defect information in parallel from the plurality of processor elements as information concerning individual defects detected by the processor elements, and outputs the defect information as a set of defect information. Each individual one of the processor elements performs a reexamination on the defect detected by the individual processor element, before sending the defect information to the processor unit.