A laser tracking interferometer directs a laser beam to a retroreflector
serving as an object to be measured to sense a displacement of the
retroreflector using interference with a laser beam back reflected from
the retroreflector. The laser tracking interferometer includes: a
reference sphere; a carriage that rotates about a center of the reference
sphere; a laser interferometer; a displacement gage for providing a
displacement signal corresponding to a relative displacement between the
reference sphere and the displacement gage; a data processing apparatus
for computing a displacement of the retroreflector; a position sensitive
detector for providing a position signal corresponding to deviation of a
laser beam; and a controller for controlling rotation of the carriage
based on the position signal so that the amount of deviation becomes
zero.