The instant invention relates to a process for the preparation of
hydroxy-vinyl-aromatic polymers in particular 4-hydroxystyrene polymers
or copolymers by anionic or controlled radical polymerization of the
respective monomer, wherein the hydroxy functionality is blocked with a
protective group which is subsequently removed by reacting it with a
halosilane reagent. The resulting (co)polymers have a narrow
polydispersity and are useful for manufacturing photoresists.