The present invention relates to a neutral particle beam processing
apparatus. More specifically, the present invention relates to a neutral
particle beam processing apparatus comprising a plasma discharging space
inside which processing gases are converted to plasma ions through a
plasma discharge, a heavy metal plate which converts the plasma ions into
neutral particles through collisions, a plasma limiter which prevents
plasma ions and electrons from passing through and allows the neutral
particles produced by collisions of the plasma ions with the heavy metal
plate to pass through, and a treating housing inside which a substrate to
be treated is located, wherein the plasma discharging space is sandwiched
between the heavy metal plate and the plasma limiter.