A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.

 
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< Re-routing apparatus and method for calculating an optimum alternative path to an original path from a position deviated from the original path in a navigation system and a navigation system using the same

> Methods and apparatus for a navigation system with reduced susceptibility to interference and jamming

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