Two coil forming elements (12, 14) formed of conductor layers and a contact means (19), which is formed in an interlayer dielectric film (13) interposed between the conductor layers and brings the upper and lower coil forming elements into contact with each other through a via hole form a stacked coil (10). One end of the stacked coil is connected to an upper grounding layer (27) of a strip line (20), and the other end of the stacked coil is connected to a strip conductor (23) of the strip line. The number of turns of the stacked coil is larger than 1. A magnetic flux penetrating through the stacked coil increases to be able to induce a relatively large electromotive force. Thus, a high spatial resolution can be obtained easily.