A system and method for determining a location and a direction for viewing a protrusion, comprising: casting a plurality of rays in an outward direction from a point, wherein the point is inside a protrusion; selecting at least one of the plurality of rays for determining a location and a direction for viewing the protrusion; and determining the location and the direction for viewing the protrusion using the selected at least one of the plurality of rays.

 
Web www.patentalert.com

< Scan method

> Pattern inspection method and apparatus, and pattern alignment method

~ 00422