Disclosed are techniques and apparatus for providing metrology or
inspection targets in-chip. That is, targets are integrated within the
product device or die area. In general terms, the present invention
provides techniques for enabling inspection or metrology on targets
within the die or active area. Said in another way, target structures are
inserted within the die or active area. In one embodiment, a set of rules
are provided for integrating test structures within the die. For example,
these rules may be implemented by one or more design engineers or by
place-and-route tools which automatically generate the die layout pattern
and thereafter insert the target structures into the die layout pattern
based on these rules. Location data of each target is then retained
during the layout generation and provided to one or more inspection or
metrology tools and/or metrology engineers so that each target may be
found and then inspected or measured.