A lithography apparatus is provided. The apparatus includes: a stage, a first light source unit, an optical system, an image obtaining means, an image edit means, an LC panel, and a second light source unit. The LC panel is coupled with the optical system and receives a signal of the image edited by the image edit means and displays the received image to perform a photo mask function. The second light source unit provides light used in performing an exposure on the test material using the imaged displayed on the LC panel for a photo mask.

 
Web www.patentalert.com

< Process of synthesis of compounds having nitrile functions from ethylenically unsaturated compounds

> Non-thermal process for forming porous low dielectric constant films

~ 00413