The invention relates to a method of producing silane or
hydrochlorosilanes by disproportionation of a higher chlorinated
hydrochlorosilane or a mixture of said hydrochlorosilanes in the presence
of a catalyst. Before the catalyst is used, it is a) washed with
hyper-pure water in one or several steps; b) transferred in the
water-moist state to the reactor in which the disproportionation is to
proceed; c) treated in the reactor with boiling methanol or rinsed with
anhydrous methanol; and d) the methanol is removed from the catalyst by
evacuation and/or stripping with inert gas. The invention further relates
to a method for treating disproportionation catalysts.