A simple and practical wafer support member which holds vacuum tight comprises a plate-shaped ceramic body having one main surface of a mount surface on which a wafer is mounted and a penetrating via hole from one main surface to the other main surface, a conductive layer provided on the mount surface, a connection conductive layer provided on an inner surface of the via hole so as to be connected to the conductive layer, a buried conductive layer which is buried in the plate-shaped ceramic body so as to be connected to the connection conductive layer, and a conducting terminal having one end and the other end and arranged apart from the via hole Of the plate-shaped ceramic body so that it is connected to the buried conductive layer in the vicinity of its one end and the other end protrudes from the other main surface of the ceramic body.