A method of forming an anisotropic crystal film, comprising providing a donor which comprises a base and an anisotropic crystal film bounded to the base, and a receptor. At least a portion of the anisotropic crystal film is placed in contact with the receptor. A loading is applied to at least a portion of the base, whereby providing shear and compressive stresses onto the donor and receptor, and transferring at least a portion of the anisotropic crystal film onto the receptor and delaminating the at least portion of the anisotropic crystal film from the base.

 
Web www.patentalert.com

> Transport method and transport apparatus for semiconductor wafer

~ 00392