For adjusting a positional relationship between a specimen and a probe to
measure an electric characteristic of the specimen through a contact
therebetween, a base table holding a specimen table holding the specimen
and a probe holder holding the probe is positioned at a first position to
measure the positional relationship between the probe and the specimen at
the first position, and subsequently positioned at a second position to
measure the positional relationship therebetween at the second position
so that the probe and the specimen are contact each other at the second
position, the specimen table and the probe holder are movable with
respect to each other on the base table at each of the first and second
positions to adjust the positional relationship between the probe and the
specimen, and a measuring accuracy at the second position is superior to
a measuring accuracy at the first position.