At first, a sample for obtaining light measurement data is set to obtain reflectances. After setting an arbitrary wavelength .lamda..sub.i, a principal component analysis is executed to obtain an eigenvalue 1 and an eigenvector b. Then a basic equation for reflectance is determined by deriving a coefficient k, utilizing a known reflectance of an object of which reflectance is to be estimated. Thereafter a process of deriving a reflectance at an arbitrary displacement angle is executed for all the wavelengths, for example over a visible wavelength range. In this manner, the reflectance of an object at an arbitrary displacement angle can easily be obtained by utilizing the basic equation for the reflectance derived from the eigenvector obtained from the principal component analysis of the measured data.

 
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> Electrostatic chuck and its manufacturing method

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